Highly coupled and low frequency vibrational energy harvester using lithium niobate on silicon

نویسندگان

چکیده

LiNbO3 has been little studied for the piezoelectric energy harvesting applications. Although it is a cheap material without lead and toxic elements, beneficiates of technological maturity in single crystal fabrication optical acoustic In this Letter, we propose to investigate (YXlt)/128°/90° cut as offers transverse coupling k23 = 0.49, which comparable that commonly used PZT ceramics. A flexible beam 65 mm length tip mass made thick film bonded on silicon were under 0.1 g sinusoidal acceleration. The presented an open-circuit resonance frequency 105.9 Hz displacement up 1.5 mm. frame degree freedom lumped model with rectifying bridge, electromechanical device (km2), figure merit km2Q, normalized average power density compared both Pb-based Pb-free current devices. generated by our was 965 ?W/cm2/g2, among highest reported values Pb- vibrational

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ژورنال

عنوان ژورنال: Applied Physics Letters

سال: 2021

ISSN: ['1520-8842', '0003-6951', '1077-3118']

DOI: https://doi.org/10.1063/5.0052615